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Efficient porous silicon organic vapors sensors werefabricated byemploying a multiporous
silicon layer (mPSi) within (Au/mPSi/n-Si/Au) sandwich structures. Based on the
morphological nature and the resistivity of resulting (mPSi), the mechanism of current
flow in the sensor was analyzed. The SEM images of (mPSi) layer reflect the formation
of complex porous and mud-like structures. The mud-like structure consists of connected
and non-connected trenches whilethe pore-like structure consists of different pore sizes
formed inside this structure. The current response is governed by the silicon channel
between the adjacent mud’srather than the silicon nanowires between the adjacent pores.
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