Characteristics of Nanostructure Porous Silicon Prepared by Anodization Technique
Dr.Uday M. Nayef , Ayoub H. Jaafar
Abstract

Porous silicon (PS) layers are prepared by anodization for different current densities. The samples are then characterized the nanocrystalline porous silicon layer by X-Ray Diffraction (XRD), Atomic Force Microscopy (AFM), Fourier Transform Infrared (FTIR), Reflectivity and Raman. PS layers were formed on a p-type Si wafer. anodized electrically with a 10 and 40 mA/cm2 current density for fixed 20 min etching times.
We have estimated crystallites size from X-Ray diffraction about nanoscale for porous silicon and AFM confirms the nanometric size and therefore optical properties about nanocrystalline silicon yields a Raman spectrum showing a broadened peak shifted below 520 cm-1.
Keywords: porous silicon, X-Ray Diffraction, morphological properties, Fourier Transform Infrared, Reflectivity, Raman